TTC Topical Workshop on SRF Cryomodule Clean Room Assembly

Name: TTC Topical Workshop on SRF Cryomodule Clean Room Assembly
Start: 2014-11-12T08:30:00+01:00
End: 2014-11-14T16:30:00+01:00
Location: CEA Saclay

12–14 nov. 2014

CEA Saclay

Fuseau horaire Europe/Paris

Accueil
2nd Announcement - Call for contributions
Committees
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Liste des participants
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Contact Information

Indico Support:

bousson@ipno.in2p3.fr

Carl Zeiss EUV-Lithotool: Particle and cleanliness challenges

12 nov. 2014, 17:00

30m

Room A. Berthelot - Building 141 (CEA Saclay)

Room A. Berthelot - Building 141

CEA Saclay

91400 Gif sur Yvette France

Experience from other industrial application

Rüdiger DÜSING (CARL ZEISS SMT)

Slides

Dusing_Particular_Contamination_while_Lithotool_fabrication_TTC_Confe....pdf

TTC Topical Workshop on SRF Cryomodule Clean Room Assembly

Indico Support:

Carl Zeiss EUV-Lithotool: Particle and cleanliness challenges

Room A. Berthelot - Building 141

CEA Saclay

Orateur

Documents de présentation

Choisissez le fuseau horaire

TTC Topical Workshop on SRF Cryomodule Clean Room Assembly

Indico Support:

Orateur

Documents de présentation