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20th Brazilian Workshop On Semiconductor Physics

12–16 sept. 2022
Instituto Tecnológico de Aeronáutica
Fuseau horaire America/Sao_Paulo

Contact

Session

Oral

16 sept. 2022, 09:50
Instituto Tecnológico de Aeronáutica

Instituto Tecnológico de Aeronáutica

Praça Marechal Eduardo Gomes, 50 - Vila das Acacias, São José dos Campos - SP, 12228-900

Documents de présentation

BWSP_20th_Cassimiro_Vinicius.pdf
  1. 29. Structure of Energized Microlamps in Micrometric Scale
    Prof. Vinicius R. S. Cassimiro (Faculdade de Tecnologia do Tatuapé (FATEC))
    16/09/2022 09:50

    Abstract

    This work presents a study about the structure of thin films, deposited to be a protection layer against oxidation of microlamps, as well as chemical and structural modifications induced by their heating under operation. The studied microlamps (fig. 1) were produced by Plasma Enhanced Chemical Vapor Deposition (PECVD) and sputtering, over silicon substrates, and have applications...

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