Prof.
Vinicius R. S. Cassimiro
(Faculdade de Tecnologia do Tatuapé (FATEC))
16/09/2022 09:50
Abstract
This work presents a study about the structure of thin films, deposited to be a protection layer against oxidation of microlamps, as well as chemical and structural modifications induced by their heating under operation. The studied microlamps (fig. 1) were produced by Plasma Enhanced Chemical Vapor Deposition (PECVD) and sputtering, over silicon substrates, and have applications...
